Analysis of silicon nitride layers deposited from SiH 4 and N 2 on silicon / O. Meyer and W. Scherber

By: Contributor(s): Resource type: Ressourcentyp: BuchBookLanguage: English Series: Kernforschungszentrum Karlsruhe. Kernforschungszentrum Karlsruhe ; 1491Publisher: Karlsruhe : Ges. f. Kernforschung, 1971Description: S. 1910 - 1915 : graph. DarstReport number: KfK 1491Genre/Form: Call number: Grundsignatur: CN KFK-1491PPN: PPN: 1605107271
Holdings
Item type Home library Shelving location Call number Copy number Status Date due Barcode Item holds
Magazinbestand ausleihbar Bibliothek Campus Nord Geschlossenes Magazin CN KFK-1491 Available 53601824090
Freihandbestand Präsenznutzung Bibliothek Campus Nord Geschlossenes Magazin CN KFK-1491 ;b Not for loan 53601835090
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