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EMC 2003 : lectures held at the GMM conference, January 13 - 15, 2003 in Sonthofen, Germany / 19th European Mask Conference on Mask Technology for Integrated Circuits and Micro-Components. Conference chairperson: Uwe Behringer. Organizer: VDE/VDI Society Microelectronics, Micro- and Precision Engineering (GMM). In cooperation with Semiconductor Equipment and Materials International, Europe (SEMI-Europe) ...

By: Contributor(s): Resource type: Ressourcentyp: BuchBookLanguage: English Series: Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik. GMM-Fachbericht ; 39Publisher: Berlin ; Offenbach : VDE-Verl., 2003Description: 310 S. : Ill., graph. Darst. ; 30 cmISBN:
  • 380072748X
Subject(s): Genre/Form: DDC classification:
  • 621.3815/31
Action note:
  • 2
Call number: Grundsignatur: 2003 E 644PPN: PPN: 1605456950
Holdings
Item type Home library Collection Shelving location Call number Status Barcode
Freihandbestand ausleihbar Bibliothek Campus Süd nach 8.23 Lesesaal Technik (LST) 2003 E 644 Available 45112199090
Total holds: 0

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