Handbook of silicon based MEMS materials and technologies / edited by Markku Tilli [and others]

Contributor(s):

Markku, Tilli [HerausgeberIn]

Resource type: Ressourcentyp: BuchBookLanguage: English Series: Micro & Nano technologies seriesPublisher: Amsterdam ; Heidelberg : Elsevier William Andrew, 2015Edition: Second editionDescription: xxxvii, 787 Seiten : Illustrationen, Diagramme ; 29 cmISBN:

0323299652
9780323299657

Subject(s):

Additional physical formats: Erscheint auch als: Handbook of silicon based MEMS materials and technologies. Online-Ressource. Second edition. Amsterdam : Elsevier, William Andrew, 2015. 1 Online Ressource (xxxvii, 787 Seiten) | Erscheint auch als: Handbook of silicon based MEMS materials and technologies. Online-Ausgabe. Second edition. London, UK : William Andrew is an imprint of Elsevier, 2015. Online RessourceDDC classification:

621.38152

RVK: RVK: ZN 3750LOC classification:

TK7875.H36 2015

Call number: Grundsignatur: 2016 E 102PPN: PPN: 1618777513

Holdings ( 1 )

Holdings
Item type	Home library	Collection	Shelving location	Call number	Status	Barcode
Freihandbestand ausleihbar	Bibliothek Campus Süd	inst 3.7	Lesesaal Technik (LST)	2016 E 102	Available	53169087090

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