Post-processing techniques for integrated MEMS / Sherif Sedky

By:

Sedky, Sherif [aut]

Resource type: Ressourcentyp: BuchBookLanguage: English Series: Artech House microelectromechanical systems seriesPublisher: Boston, Mass. ; London : Artech House, c2006Description: XIV, 207 S. : Ill., graph. Darst. ; 23cmISBN:

1580539017

Subject(s):

MEMS
Mikrosystemtechnik
Nanotechnologie
Mikrobearbeitung
Monolithische Schaltung
Silicium
Germanium
Microelectromechanical systems

Additional physical formats: Erscheint auch als: Post-processing techniques for integrated MEMS. Online-Ausgabe Boston : Artech House, 2006. 1 Online-Ressource (219 Seiten)DDC classification:

621.381

RVK: RVK: ZN 3750LOC classification:

TK7875

Call number: Grundsignatur: 2005 A 14116PPN: PPN: 1621930351

Holdings ( 1 )

Holdings
Item type	Home library	Collection	Shelving location	Call number	Status	Date due	Barcode	Item holds
Freihandbestand ausleihbar	Bibliothek Campus Süd	inst 3.7	Lesesaal Technik (LST)	2005 A 14116	Available		47896576090

Total holds: 0

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