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Optical inspection of microsystems / ed. by Wolfgang Osten

Contributor(s): Resource type: Ressourcentyp: BuchBookLanguage: English Series: Optical science and engineering ; 109Publisher: Boca Raton, Fla. [u.a.] : CRC / Taylor & Francis, 2007Description: 503 S. : zahlr. Ill. und graph. DarstISBN:
  • 9780849336829
  • 0849336821
Subject(s): Additional physical formats: Erscheint auch als: Optical inspection of microsystems. Online-Ausgabe. Boca Raton, Fl. [u.a.] : CRC, 2006. Online-RessourceDDC classification:
  • 670.42/5
  • 670.425
RVK: RVK: ZN 4032 | ZN 3750LOC classification:
  • TS156.2
Call number: Grundsignatur: 2006 E 783PPN: PPN: 1623728371
Holdings
Item type Home library Collection Shelving location Call number Status Barcode
Freihandbestand ausleihbar Bibliothek Campus Süd inst 3.9 Lesesaal Technik (LST) 2006 E 783 Available 47870934090
Total holds: 0