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Low dielectric constant materials for IC applications / P. S. Ho ... (eds.)

Contributor(s): Resource type: Ressourcentyp: BuchBookLanguage: English Series: Physics and astronomy online library | Advanced microelectronics ; 9Publisher: Berlin ; Heidelberg [u.a.] : Springer, 2003Description: XIX, 309 S. : Ill., graph. DarstISBN:
  • 3540678190
Subject(s): Genre/Form: DDC classification:
  • 621.3815
RVK: RVK: ZN 3400 | UP 3100 | UP 4600 | ZN 3490LOC classification:
  • TK3401
Call number: Grundsignatur: 2003 A 6389PPN: PPN: 1628686634
Holdings
Item type Home library Collection Shelving location Call number Status Barcode
Freihandbestand ausleihbar Bibliothek Campus Süd nach 8.21 Lesesaal Technik (LST) 2003 A 6389 Available 45043279090
Total holds: 0