Journal of vacuum science & technology : the official journal of the American Vacuum Society / publ. by the American Institute of Physics

Contributor(s): Resource type: Ressourcentyp: ZeitschriftPeriodicalLanguage: English Volumes: Bände: Show volumesZeige BändePublisher: New York, NY : Inst., 1964-1982ISSN:
  • 0022-5355
Other title:
  • The journal of vacuum science and technology
Former title: Früherer Titel: The journal of vacuum science and technology, Hauptsacht. bis 9.1972Subject(s): Genre/Form: Additional physical formats: 2331-1754 | Erscheint auch als: Journal of vacuum science & technology. Online-Ausgabe. New York, NY : Inst., 1964. Online-RessourceDDC classification:
  • 530
Call number: Grundsignatur: Z 633Publication dates: Erscheinungsverlauf: 1.1964 - 21.1982Holdings: Institut für Mikro- u. Nanoelektronische Systeme: 12.1975 - 21.1982; KIT-Bibliothek (Z 633), CN LS: 1.1964 - 21.1982Get a copy of article (LEA)Aufsatzkopie bestellen (LEA)Continued by: Forts.: Journal of vacuum science and technology / A., New York, NY : Inst., 1983Continued by: Forts.: Journal of vacuum science and technology / B., New York, NY : Inst., 1983PPN: PPN: 129550701ZDB ID: ZDB-ID: 219313-9
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