Principles and Applications of NanoMEMS Physics / by Héctor J. Santos
Contributor(s): Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Series: Microsystems ; 15 | SpringerLink BücherPublisher: Boston, MA : Springer US, 2005Description: Online-Ressource (XV, 254 p, digital)ISBN:- 9780387258348
- 537.5
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