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Reactive Sputter Deposition / edited by Diederik Depla, Stijn Mahieu

Contributor(s): Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Series: Springer Series in Materials Science ; 109 | SpringerLink BücherPublisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2008Description: Online-Ressource (digital)ISBN:
  • 9783540766643
Subject(s): Additional physical formats: 9783540766629 | Buchausg. u.d.T.: Reactive sputter deposition. Berlin : Springer, 2008. XVIII, 572 S.RVK: RVK: ZM 7640LOC classification:
  • TA418.7-418.76 TA418.9.T45
DOI: DOI: 10.1007/978-3-540-76664-3Online resources: PPN: PPN: 1647227267Package identifier: Produktsigel: ZDB-1-SCM | ZDB-2-CMS
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