APA

Gupta D. C., Gupta D. C., ASTM Committee F-1 on Electronics, Semiconductor Equipment and Materials Institute & International Symposium on Semiconductor Processing. (1989). Semiconductor fabrication: technology and metrology. Philadelphia, Pa: American Society for Testing and Materials.

Chicago

Gupta Dinesh C, Gupta Dinesh C, ASTM Committee F-1 on Electronics, Semiconductor Equipment and Materials Institute and International Symposium on Semiconductor Processing. 1989. Semiconductor fabrication: technology and metrology. Philadelphia, Pa: American Society for Testing and Materials.

Harvard

Gupta D. C., Gupta D. C., ASTM Committee F-1 on Electronics, Semiconductor Equipment and Materials Institute and International Symposium on Semiconductor Processing. (1989). Semiconductor fabrication: technology and metrology. Philadelphia, Pa: American Society for Testing and Materials.

MLA

Gupta Dinesh C, Gupta Dinesh C, ASTM Committee F-1 on Electronics, Semiconductor Equipment and Materials Institute and International Symposium on Semiconductor Processing. Semiconductor fabrication: technology and metrology. Philadelphia, Pa: American Society for Testing and Materials. 1989.