Nanofabrication : Principles, Capabilities and Limits / by Zheng Cui

By:

Cui, Zheng [aut]

Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Series: SpringerLink Bücher | Springer eBook Collection EngineeringPublisher: Cham : Springer, 2017Edition: 2nd ed. 2017Description: Online-Ressource (XVII, 432 p. 316 illus., 50 illus. in color, online resource)ISBN:

9783319393612

Subject(s):

Additional physical formats: 9783319393599 | Druckausg.: Nanofabrication. Second edition. [Cham] : Springer, 2017. xvii, 432 Seiten | Printed edition: 9783319393599 RVK: RVK: ZN 4100LOC classification:

T174.7

DOI: DOI: 10.1007/978-3-319-39361-2Online resources:

Summary: This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challengesSummary: 1. Introduction -- 2. Nanofabrication by Photons -- 3. Nanofabrication by Electron Beam -- 4. Nanofabrication by Ion Beam -- 5. Nanofabrication by Scanning Probes -- 6. Nanofabrication by Replication -- 7. Nanoscale Pattern Transfer by Etching -- 8. Nanoscale Pattern Transfer by Deposition -- 9. Indirect Nanofabrication -- 10. Nanofabrication by Self-Assembly -- 11. Applications of Nanofabrication TechnologiesPPN: PPN: 1658676645Package identifier: Produktsigel: ZDB-2-ENG

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