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Optical Microlithography XXXII : 26-27 February 2019, San Jose, California, Unites States / Jongwook Kye, Soichi Owa (editors) ; sponsored and published by: SPIE

By: Contributor(s): Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Series: SPIE. Proceedings of SPIE ; volume 10961Publisher: Bellingham, Washington, USA : SPIE, [2019]Description: 1 Online-Ressource : IllustrationenISBN:
  • 9781510625709
Other title:
  • SPIE Advanced Lithography
Subject(s): Genre/Form: Additional physical formats: 9781510625693 Online resources: PPN: PPN: 1667751166Package identifier: Produktsigel: ZDB-1-SPIE
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