Metrology, Inspection, and Process Control for Microlithography XXXIII : 25-28 February 2019, San Jose, California, Unites States / Vladimir A. Ukraintsev, Ofer Adan (editors) ; sponsored by: SPIE

By:

(33. : Metrology, Inspection, and Process Control for Microlithography (Veranstaltung) (33. : 2019 : San Jose, Calif.) [VerfasserIn]

Contributor(s):

Ukraintsev, Vladimir A [HerausgeberIn]
Adan, Ofer [HerausgeberIn]
SPIE [Herausgebendes Organ, SponsorIn]

Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Series: SPIE. Proceedings of SPIE ; volume 10959Publisher: Bellingham, Washington, USA : SPIE, [2019]Description: 1 Online-Ressource : IllustrationenISBN:

9781510625662

Other title:

SPIE Advanced Lithography Conference

Genre/Form:

Konferenzschrift

Additional physical formats: 9781510625655 Online resources:

Zugang im Netz des KIT
Zugang im Netz der HKA

PPN: PPN: 1669016188Package identifier: Produktsigel: ZDB-1-SPIE

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