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Advances in Metrology for X-Ray and EUV Optics VIII : 11-12 August 2019, San Diego, California, United States / Lahsen Assoufid, Haruhiko Ohashi, Anand Asundi (editors) ; sponsored and published by: SPIE

By: Contributor(s): Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Series: SPIE. Proceedings of SPIE ; volume 11109Publisher: Bellingham, Washington, USA : SPIE, [2019]Description: 1 Online-Ressource : IllustrationenISBN:
  • 9781510629127
Other title:
  • SPIE Optical Engineering + Applications Photonics
Subject(s): Genre/Form: Additional physical formats: 9781510629110 Online resources: PPN: PPN: 1680687700Package identifier: Produktsigel: ZDB-1-SPIE
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