Capacitive silicon resonators : performance enhancement methods / Nguyen Van Toan and Takahito Ono

Von:

Toan, Nguyen Van [VerfasserIn]

Mitwirkende(r):

Ono, Takahito [VerfasserIn]

Resource type: Ressourcentyp: Buch (Online)Buch (Online)Sprache: Englisch Verlag: Boca Raton, FL : CRC Press/Taylor & Francis Group, [2020]Beschreibung: 1 Online-RessourceISBN:

0429266014
0429556527
0429565461
0429560990
9780429556524
9780429565465
9780429266010
9780429560996

Schlagwörter:

Andere physische Formen: 9780367217761 | 0367217767 | 9780367217761 | Erscheint auch als: Capacitive silicon resonators. Druck-Ausgabe Boca Raton, FL : CRC Press/Taylor & Francis Group, [2020]LOC-Klassifikation:

TK7872.D53

Online-Ressourcen:

Zugang im Netz des KIT

Zusammenfassung: "Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology"--PPN: PPN: 1685637477Package identifier: Produktsigel: BSZ-4-NLEBK-KAUB | ZDB-4-NLEBK

Exemplare ( 0 )

Dieser Titel hat keine Exemplare