Chemicals Vapour Deposition in the Semiconductor Industry / Organisation for Economic Co-operation and Development

Contributor(s):

OECD [Herausgebendes Organ]

Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Series: Series on Emission Scenario Documents ; no.35Publisher: Paris : OECD Publishing, 2015Description: 1 Online-Ressource (80 p.)ISBN:

9789264502437

Subject(s):

Environment

DOI: DOI: 10.1787/b0957a80-enOnline resources:

Summary: This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases and occupational exposures, and discusses the typical engineering controls used to mitigate exposure to CVD precursors.PPN: PPN: 1747657999Package identifier: Produktsigel: ZDB-13-SOC | ZDB-13-SOC-ebook

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