Introduction to microlithography / ed. by Larry F. Thompson ...

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Resource type: Ressourcentyp: BuchBookLanguage: English Series: ACS professional reference bookPublisher: Washington, DC : American Chemical Soc., 1994Edition: 2. edDescription: XIV, 527 S : Ill., graph. DarstISBN:

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RVK: RVK: ZN 4170LOC classification:

Call number: Grundsignatur: 83 A 2050(2)PPN: PPN: 131604287

Holdings
Item type	Home library	Collection	Shelving location	Call number	Copy number	Status	Barcode
Freihandbestand ausleihbar	Bibliothek Campus Nord	nach 8.23	Lesesaal CN	83 A 2050(2)		Available	51592451090
Freihandbestand ausleihbar	Bibliothek Campus Nord	nach 8.23	Lesesaal CN	83 A 2050(2)	;b	Available	51592417090

Total holds: 0