Journal of vacuum science & technology : JVST ; an AVS journal. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena / publ. by the Society through the American Institute of Physics

Contributor(s): Resource type: Ressourcentyp: Zeitschrift (Online)Periodical (Online)Language: English Volumes: Bände: Show volumesZeige BändePublisher: New York, NY : AIP Publishing, 2010-Description: Online-RessourceISSN:
  • 2166-2754
Other title:
  • Abweichender Titel: Nanotechnology and microelectronics
  • Abweichender Titel: JVST B
  • Journal of vacuum science and technology
Subject(s): Genre/Form: Additional physical formats: 2166-2746 | Erscheint auch als: Journal of vacuum science and technology / B. Druck-Ausgabe. New York, NY : Inst., 1983DDC classification:
  • 530
Online resources: Publication dates: Erscheinungsverlauf: 2nd ser., Volume 28, Issue 1, (January 2010)-Holdings: KIT-Bibliothek: 28.2010,1 - 38.2020; KIT-Bibliothek, Nationalkonsortium: 28.2010,1 -Continues: Fortsetzung von: Journal of vacuum science & technology. B, Microelectronics and nanometer structures., New York : Published for the Society by the American Institute of Physics, 1991.PPN: PPN: 1800461763ZDB ID: ZDB-ID: 3117331-7Package identifier: Produktsigel: ZDB-1-AIPO
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