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High vacuum production in the microelectronics industry / Pierre Duval
Resource type: Ressourcentyp: BuchBookLanguage: English Series: Plasma technology ; 2Publisher: Amsterdam [u.a.] : Elsevier, 1988Description: XIII, 222 S. : zahlr. Ill., graph. DarstISBN:- 044442878X
- 0444424695
- 621.5'5
- 671.7/35
| Item type | Home library | Collection | Shelving location | Call number | Copy number | Status | Barcode | |
|---|---|---|---|---|---|---|---|---|
| Freihandbestand ausleihbar | Bibliothek Campus Nord | nach 8.23 | Lesesaal CN | 88 A 3316 | ;b | Available | 50948992090 | |
| Magazinbestand ausleihbar | Bibliothek Campus Süd | Geschlossenes Magazin | 88 A 3316 | Available | 46744450090 |
Total holds: 0