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Laser microfabrication : thin film processes and lithography / Daniel J. Ehrlich; Jeffrey Y. Tsao

Contributor(s): Resource type: Ressourcentyp: BuchBookLanguage: English Publisher: Boston [u.a.] : Academic Press, 1989Description: XII, 587 S : graph. Darst ; 24 cmISBN:
  • 0122334302
Subject(s): DDC classification:
  • 621.36/6 19
  • 621.366
RVK: RVK: UH 5790 | UH 5750LOC classification:
  • TA1677
Call number: Grundsignatur: 89 A 3663PPN: PPN: 017070015
Holdings
Item type Home library Shelving location Call number Copy number Status Barcode
Magazinbestand ausleihbar Bibliothek Campus Nord Geschlossenes Magazin 89 A 3663 ;b Available 52001561090
Magazinbestand ausleihbar Bibliothek Campus Süd Geschlossenes Magazin 89 A 3663 Available 45140468090
Total holds: 0