APA
Symposium on Photomask and Next-Generation Lithography Mask Technology, Nakata H., Photomask Japan & SPIE. (2024). Photomask Japan 2024: XXX Symposium on Photomask and Next-Generation Lithography Mask Technology. Bellingham, Washington, USA: SPIE.
Chicago
Symposium on Photomask and Next-Generation Lithography Mask Technology, Nakata Hiroshi, Photomask Japan and SPIE. 2024. Photomask Japan 2024: XXX Symposium on Photomask and Next-Generation Lithography Mask Technology. Bellingham, Washington, USA: SPIE.
Harvard
Symposium on Photomask and Next-Generation Lithography Mask Technology, Nakata H., Photomask Japan and SPIE. (2024). Photomask Japan 2024: XXX Symposium on Photomask and Next-Generation Lithography Mask Technology. Bellingham, Washington, USA: SPIE.
MLA
Symposium on Photomask and Next-Generation Lithography Mask Technology, Nakata Hiroshi, Photomask Japan and SPIE. Photomask Japan 2024: XXX Symposium on Photomask and Next-Generation Lithography Mask Technology. Bellingham, Washington, USA: SPIE. 2024.