39th European Mask and Lithography Conference (EMLC 2024) : 17-19 June 2024, Grenoble, France / Uwe F.W. Behringer, Jo Finders (editors) ; organized by: VDE/VDI GMM - the Society for Microelectronics, Microsystems and Precision Engineering (Germany), UBC Microelectronics (Germany)

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(39. : European Mask and Lithography Conference (39. : 2024 : Grenoble) [VerfasserIn]

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Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Series: SPIE. Proceedings of SPIE ; volume 13273Publisher: Bellingham, Washington, USA : SPIE, [2024]Description: 1 Online-Ressource : IllustrationenISBN:

9781510682894

Other title:

Thirty-ninth

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Konferenzschrift

Additional physical formats: 9781510682887 Online resources:

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PPN: PPN: 1904925472Package identifier: Produktsigel: ZDB-1-SPIE

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