Eighth International Workshop on Advanced Patterning Solutions (IWAPS 2024) : 15-16 October 2024, Jiaxing, China / Yayi Wei, Tianchun Ye (editors) ; sponsored by: China Integrated Circuit Innovation Alliance (China), the Chinese Optical Society (China), Institute of Microelectronics of Chinese Academy of Sciences (China)
Mitwirkende(r): Resource type: Ressourcentyp: Buch (Online)Buch (Online)Sprache: Englisch Reihen: SPIE. Proceedings of SPIE ; volume 13423Verlag: Bellingham, Washington, USA : SPIE, [2024]Beschreibung: 1 Online-Ressource : IllustrationenISBN:- 9781510686335
- 8th International Workshop on Advanced Patterning Solutions (IWAPS 2024)
Dieser Titel hat keine Exemplare