Eighth International Workshop on Advanced Patterning Solutions (IWAPS 2024) : 15-16 October 2024, Jiaxing, China / Yayi Wei, Tianchun Ye (editors) ; sponsored by: China Integrated Circuit Innovation Alliance (China), the Chinese Optical Society (China), Institute of Microelectronics of Chinese Academy of Sciences (China)

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(8. : International Workshop on Advanced Patterning Solutions (8. : 2024 : Jiaxing) [VerfasserIn]

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Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Series: SPIE. Proceedings of SPIE ; volume 13423Publisher: Bellingham, Washington, USA : SPIE, [2024]Description: 1 Online-Ressource : IllustrationenISBN:

9781510686335

Other title:

8th International Workshop on Advanced Patterning Solutions (IWAPS 2024)

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Konferenzschrift

Additional physical formats: 9781510686328 Online resources:

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PPN: PPN: 1912135043Package identifier: Produktsigel: ZDB-1-SPIE

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