DTCO and Computational Patterning IV : 25-28 February 2025, San Jose, California, United States / Neal V. Lafferty, Harsha Grunes (editors) ; sponsored by: SPIE

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DTCO and Computational Patterning (Veranstaltung) : (2025 : San Jose, Calif.) [VerfasserIn]

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Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Series: SPIE. Proceedings of SPIE ; volume 13425Publisher: Bellingham, Washington, USA : SPIE, [2025]Description: 1 Online-Ressource : IllustrationenISBN:

9781510686373

Other title:

SPIE Advanced Lithography

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Konferenzschrift

Additional physical formats: 9781510686366 Online resources:

Zugang im Netz des KIT

PPN: PPN: 1926237382Package identifier: Produktsigel: ZDB-1-SPIE

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