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Inertial MEMS : Principles and Practice / Volker Kempe

By: Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Publisher: Cambridge : Cambridge University Press, 2011Edition: Online-AusgDescription: Online-Ressource (1 online resource (492 p.)) : digital, PDF file(s)ISBN:
  • 9780511933899
Subject(s): Additional physical formats: 9780521766586. | Erscheint auch als: Inertial MEMS. Druck-Ausgabe Cambridge [u.a.] : Cambridge Univ. Press, 2011. XIV, 475 S | Erscheint auch als: 9780521766586 Druck-AusgabeDDC classification:
  • 681.2
  • 629.04/5 22
RVK: RVK: ZN 3750LOC classification:
  • TK7875
DOI: DOI: 10.1017/CBO9780511933899Online resources: Summary: A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the areaSummary: Machine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS - technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; IndexPPN: PPN: 883416328Package identifier: Produktsigel: ZDB-20-CTM | ZDB-20-CBO
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