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Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / ed. by Stephen M. Rossnagel ...
Contributor(s): Resource type: Ressourcentyp: BuchBookLanguage: English Series: Materials science and process technology seriesPublisher: Park Ridge, NJ : Noyes Publ., 1990Description: XXIII, 523 S. : graph. DarstISBN:- 0815512201
- 621.044
- TA2020
| Item type | Home library | Shelving location | Call number | Copy number | Status | Barcode | |
|---|---|---|---|---|---|---|---|
| Magazinbestand ausleihbar | Bibliothek Campus Nord | Geschlossenes Magazin CN | 91 A 322 | ;b | Available | 51999065090 | |
| Magazinbestand ausleihbar | Bibliothek Campus Süd | Geschlossenes Magazin | 91 A 322 | Available | 45681326090 |
Total holds: 0