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Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / ed. by Stephen M. Rossnagel ...

Contributor(s): Resource type: Ressourcentyp: BuchBookLanguage: English Series: Materials science and process technology seriesPublisher: Park Ridge, NJ : Noyes Publ., 1990Description: XXIII, 523 S. : graph. DarstISBN:
  • 0815512201
Subject(s): DDC classification:
  • 621.044
RVK: RVK: ZN 4150 | UP 9350 | ZM 7680LOC classification:
  • TA2020
Call number: Grundsignatur: 91 A 322PPN: PPN: 01734512X
Holdings
Item type Home library Shelving location Call number Copy number Status Barcode
Magazinbestand ausleihbar Bibliothek Campus Nord Geschlossenes Magazin CN 91 A 322 ;b Available 51999065090
Magazinbestand ausleihbar Bibliothek Campus Süd Geschlossenes Magazin 91 A 322 Available 45681326090
Total holds: 0