Chemical vapor deposition for microelectronics : Principles, technology, and applications / Arthur Sherman

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Resource type: Ressourcentyp: BuchBookLanguage: English Series: Materials science and process technology seriesPublisher: Park Ridge, N.J. : Noyes Publ., 1987Description: XI, 215 S : Ill., graph. DarstISBN:

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RVK: RVK: UP 7550 | ZN 4150LOC classification:

Call number: Grundsignatur: 89 A 2800PPN: PPN: 017376246

Holdings
Item type	Home library	Shelving location	Call number	Status	Barcode
Magazinbestand ausleihbar	Bibliothek Campus Süd	Geschlossenes Magazin	89 A 2800	Available	45944039090

Total holds: 0