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Optical diagnostics for thin film processing / Irving P. Herman

By: Resource type: Ressourcentyp: BuchBookLanguage: English Publisher: San Diego, Calif. [u.a.] : Academic Press, 1996Description: XXIX, 783 S : graph. DarstISBN:
  • 0123420709
Subject(s): Additional physical formats: Online-Ausg.: Optical diagnostics for thin film processing. San Diego, CA : Academic Press, 1996. Online Ressource (xxix, 783 p.)DDC classification:
  • 621.381520287
  • 621.3815/2/0287
RVK: RVK: UP 7800LOC classification:
  • QC176.84.S93
Call number: Grundsignatur: 2012 A 3563PPN: PPN: 18549675X
Holdings
Item type Home library Collection Shelving location Call number Status Date due Barcode Item holds
Freihandbestand ausleihbar Bibliothek Campus Nord phys 8.7 Lesesaal CN 2012 A 3563 Available 51012432090
Total holds: 0

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