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Reduced thermal processing for ULSI : [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI, held June 20 - July 1, 1988, in Boca Raton, Florida] / ed. by Roland A. Levy. Publ. in cooperation with NATO Scientific Affairs Division
Contributor(s): Resource type: Ressourcentyp: BuchBookLanguage: English Series: NATO. NATO ASI series / B ; 207Publisher: New York [u.a.] : Plenum Press, 1989Description: XI, 438 S. : Ill., graph. Darst. ; 26 cmISBN:- 0306433826
- 621.395
- 621.39'5
- TK7871.85
- 3
| Item type | Home library | Shelving location | Call number | Status | Barcode | |
|---|---|---|---|---|---|---|
| Magazinbestand ausleihbar | Bibliothek Campus Süd | Geschlossenes Magazin | 90 E 166 | Available | 52324687090 |
Total holds: 0
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