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Handbook of chemical vapor deposition (CVD) : principles, technology and applications / by Hugh O. Pierson
Resource type: Ressourcentyp: BuchBookLanguage: English Series: Materials science and process technology series Electronic materials and process technologyPublisher: Park Ridge, NJ : Noyes Publ., c 1992Description: XXII, 436 S : Ill., graph. DarstISBN:- 0815513003
- 671.7/35 20
- 671.735
- TS695
- 3
| Item type | Home library | Collection | Shelving location | Call number | Status | Barcode | |
|---|---|---|---|---|---|---|---|
| Freihandbestand Präsenznutzung | Fachbibliothek Physik | phys 8.71 | Bibliothek / frei aufgestellt | 93 A 3797 | Not for loan | 33163347 |
Total holds: 0
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