Semiconductor lithography : principles, practices, and materials / Wayne M. Moreau
Resource type: Ressourcentyp: BuchBookLanguage: English Series: MicrodevicesPublisher: New York, NY [u.a.] : Plenum Pr., 1988Description: XX, 931 S. : Ill., graph. DarstISBN:- 0306421852
- 621.3815/2
- 3
Item type | Home library | Shelving location | Call number | Status | Date due | Barcode | Item holds | |
---|---|---|---|---|---|---|---|---|
Magazinbestand ausleihbar | Bibliothek Campus Süd | Geschlossenes Magazin | 88 E 344 | Available | 50622004090 |
Total holds: 0
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