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Semiconductor lithography : principles, practices, and materials / Wayne M. Moreau

By: Resource type: Ressourcentyp: BuchBookLanguage: English Series: MicrodevicesPublisher: New York, NY [u.a.] : Plenum Pr., 1988Description: XX, 931 S. : Ill., graph. DarstISBN:
  • 0306421852
Subject(s): DDC classification:
  • 621.3815/2
RVK: RVK: ZN 4170Action note:
  • 3
Call number: Grundsignatur: 88 E 344PPN: PPN: 274767031
Holdings
Item type Home library Shelving location Call number Status Date due Barcode Item holds
Magazinbestand ausleihbar Bibliothek Campus Süd Geschlossenes Magazin 88 E 344 Available 50622004090
Total holds: 0

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