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Handbook of VLSI microlithography : principles, technology and applications / ed. by William B. Glendinning ...
Contributor(s): Resource type: Ressourcentyp: BuchBookLanguage: English Series: Materials science and process technology series Electronic materials and process technologyPublisher: Park Ridge, NJ : Noyes Publ., 1991Description: XXII, 649 S. : Ill., graph. DarstISBN:- 0815512813
- 621.381531
- 621.381/531
- 3
| Item type | Home library | Shelving location | Call number | Status | Date due | Barcode | Item holds | |
|---|---|---|---|---|---|---|---|---|
| Magazinbestand ausleihbar | Bibliothek Campus Süd | Geschlossenes Magazin | 92 A 2494 | Available | 45161196090 |
Total holds: 0
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