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Handbook of sputter deposition technology : principles, technology and applications / by Kiyotaka Wasa; Shigeru Hayakawa

By: Contributor(s): Resource type: Ressourcentyp: BuchBookLanguage: English Series: Materials science and process technology seriesPublisher: Park Ridge, NJ : Noyes Publ., 1992Description: XII, 304 S. : Ill., graph. DarstISBN:
  • 0815512805
Subject(s): DDC classification:
  • 621.38152
  • 621.3815/2
RVK: RVK: UP 7550 | ZN 4150 | ZM 7620Call number: Grundsignatur: 93 A 3798PPN: PPN: 277081300
Holdings
Item type Home library Collection Shelving location Call number Copy number Status Date due Barcode Item holds
Freihandbestand ausleihbar Bibliothek Campus Nord phys 8.71 Lesesaal CN 93 A 3798 ;b Available 50670655090
Freihandbestand ausleihbar Bibliothek Campus Nord phys 8.71 Lesesaal CN 93 A 3798 ;c Available 50670746090
Freihandbestand Präsenznutzung Fachbibliothek Physik phys 8.71 Bibliothek / frei aufgestellt 93 A 3798 Not for loan 33163665
Total holds: 0

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