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Handbook of sputter deposition technology : principles, technology and applications / by Kiyotaka Wasa; Shigeru Hayakawa
Contributor(s): Resource type: Ressourcentyp: BuchBookLanguage: English Series: Materials science and process technology seriesPublisher: Park Ridge, NJ : Noyes Publ., 1992Description: XII, 304 S. : Ill., graph. DarstISBN:- 0815512805
- 621.38152
- 621.3815/2
| Item type | Home library | Collection | Shelving location | Call number | Copy number | Status | Barcode | |
|---|---|---|---|---|---|---|---|---|
| Freihandbestand ausleihbar | Bibliothek Campus Nord | phys 8.71 | Lesesaal CN | 93 A 3798 | ;c | Available | 50670746090 | |
| Freihandbestand ausleihbar | Bibliothek Campus Nord | phys 8.71 | Lesesaal CN | 93 A 3798 | ;b | Available | 50670655090 | |
| Freihandbestand Präsenznutzung | Fachbibliothek Physik | phys 8.71 | Bibliothek / frei aufgestellt | 93 A 3798 | Not for loan | 33163665 |
Total holds: 0