The physics of submicron lithography / Kamil A. Valiev
Resource type: Ressourcentyp: BuchBookLanguage: English Series: MicrodevicesPublisher: New York, NY [u.a.] : Plenum Press, 1992Description: XI, 493 S. : Ill., graph. DarstISBN:- 0306435780
- 621.381531
- 621.381/531
- TK7874
Item type | Home library | Collection | Shelving location | Call number | Status | Date due | Barcode | Item holds | |
---|---|---|---|---|---|---|---|---|---|
Freihandbestand ausleihbar | Bibliothek Campus Nord | nach 8.23 | Lesesaal CN | 2012 E 1367 | Available | 51076712090 |
Total holds: 0