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The physics of submicron lithography / Kamil A. Valiev

By: Resource type: Ressourcentyp: BuchBookLanguage: English Series: MicrodevicesPublisher: New York, NY [u.a.] : Plenum Press, 1992Description: XI, 493 S. : Ill., graph. DarstISBN:
  • 0306435780
Subject(s): DDC classification:
  • 621.381531
  • 621.381/531
RVK: RVK: ZN 4170 | UP 9300LOC classification:
  • TK7874
Call number: Grundsignatur: 2012 E 1367PPN: PPN: 277459117
Holdings
Item type Home library Collection Shelving location Call number Status Date due Barcode Item holds
Freihandbestand ausleihbar Bibliothek Campus Nord nach 8.23 Lesesaal CN 2012 E 1367 Available 51076712090
Total holds: 0
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