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Particle control for semiconductor manufacturing / [ed. by] R. P. Donovan

Contributor(s): Resource type: Ressourcentyp: BuchBookLanguage: English Publisher: New York, NY [u.a.] : Dekker, 1990Edition: 1. printDescription: XIII, 464 S. : Ill., graph. DarstISBN:
  • 0824782429
Subject(s): Genre/Form: DDC classification:
  • 621.381'52
  • 621.381/52
  • 621.38152
RVK: RVK: ZN 4100LOC classification:
  • TK7871.85
Action note:
  • 2
Call number: Grundsignatur: 90 E 622PPN: PPN: 278231179
Holdings
Item type Home library Shelving location Call number Status Date due Barcode Item holds
Magazinbestand ausleihbar Bibliothek Campus Süd Geschlossenes Magazin 90 E 622 Available 29046529
Total holds: 0

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