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Modelling of microfabrication systems / Raja Nassar; Weizhong Dai

By: Contributor(s): Resource type: Ressourcentyp: BuchBookLanguage: English Series: Microtechnology and MEMS | Physics and astronomy online libraryPublisher: Berlin ; Heidelberg [u.a.] : Springer, 2003Description: X, 269 S : Ill., graph. Darst ; 24 cmISBN:
  • 3540002529
  • 9783540002529
Subject(s): DDC classification:
  • 621.381 21
  • 621.381015118
RVK: RVK: ZN 3750 | ZN 4100 | ZN 4980 | ZN 4136LOC classification:
  • TK7836
Contents:
Action note:
  • 3
Call number: Grundsignatur: 2013 A 5478PPN: PPN: 365283746
Holdings
Item type Home library Collection Shelving location Call number Status Date due Barcode Item holds
Freihandbestand ausleihbar Bibliothek Campus Nord inst 3.7 Lesesaal CN 2013 A 5478 Available 51616514090
Total holds: 0

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