Modelling of microfabrication systems / Raja Nassar; Weizhong Dai
Contributor(s): Resource type: Ressourcentyp: BuchBookLanguage: English Series: Microtechnology and MEMS | Physics and astronomy online libraryPublisher: Berlin ; Heidelberg [u.a.] : Springer, 2003Description: X, 269 S : Ill., graph. Darst ; 24 cmISBN:- 3540002529
- 9783540002529
- 621.381 21
- 621.381015118
- TK7836
Contents:
Action note: - 3
Item type | Home library | Collection | Shelving location | Call number | Status | Date due | Barcode | Item holds | |
---|---|---|---|---|---|---|---|---|---|
Freihandbestand ausleihbar | Bibliothek Campus Nord | inst 3.7 | Lesesaal CN | 2013 A 5478 | Available | 51616514090 |
Total holds: 0
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