Modelling of microfabrication systems / Raja Nassar; Weizhong Dai

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Resource type: Ressourcentyp: BuchBookLanguage: English Series: Microtechnology and MEMS | Physics and astronomy online libraryPublisher: Berlin ; Heidelberg [u.a.] : Springer, 2003Description: X, 269 S : Ill., graph. Darst ; 24 cmISBN:

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RVK: RVK: ZN 3750 | ZN 4100 | ZN 4980 | ZN 4136LOC classification:

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Call number: Grundsignatur: 2013 A 5478PPN: PPN: 365283746

Holdings
Item type	Home library	Collection	Shelving location	Call number	Status	Date due	Barcode	Item holds
Freihandbestand ausleihbar	Bibliothek Campus Nord	inst 3.7	Lesesaal CN	2013 A 5478	Available		51616514090

Total holds: 0

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