Chemical-mechanical planarization of semiconductor materials / M. R. Oliver (ed.)

Contributor(s):

Oliver, Michael R [Hrsg.]

Resource type: Ressourcentyp: BuchBookLanguage: English Series: Springer series in materials science ; 69Publisher: Berlin ; Heidelberg [u.a.] : Springer, 2004Description: X, 425 S : illISBN:

3540431810

Other title:

chemical-mechanical

Subject(s):

Halbleiterwerkstoff
Chemisches Polieren
Semiconductors
Chemical mechanical planarization
Grinding and polishing

DDC classification:

621.38152
621.3815/2
620

RVK: RVK: ZM 7660 | ZN 4136 | VN 7150LOC classification:

TK7871.85

Call number: Grundsignatur: 2004 A 28123PPN: PPN: 368948161

Holdings ( 1 )

Holdings
Item type	Home library	Collection	Shelving location	Call number	Status	Date due	Barcode	Item holds
Freihandbestand ausleihbar	Bibliothek Campus Süd	nach 8.21	Lesesaal Technik (LST)	2004 A 28123	Available		46592670090

Total holds: 0

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