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Predictive simulation of semiconductor processing : status and challenges / J. Dabrowski; E. R. Weber (eds.)

Contributor(s): Resource type: Ressourcentyp: BuchBookLanguage: English Series: Springer series in materials science ; 72Publisher: Berlin ; Heidelberg [u.a.] : Springer, 2004Description: XVII, 490 S. : Ill., graph. Darst. ; 24 cmISBN:
  • 3540204814
Subject(s): Genre/Form: DDC classification:
  • 621.38152
  • 620
  • 621.3815/2
  • 530
  • 621.381520113
  • 530 620
RVK: RVK: UP 3100 | ZN 4810LOC classification:
  • TK7871.85
Summary: Predictive simulation of semiconductor processingenables researchers and developersto extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool. TOC:Transistors and Atoms.- Atomistic Simulations of Processes at Surfaces.- Atomistic Simulations in Materials Processing.- Atomistic Simulation of Decanano MOSFETs.- Modeling and Simulation of Heterojunction Bipolar Transistors.- Gate Oxide Reliability: Physical and Computational Models.- High-K Dielectrics: The Example of Pr2O3.- Atomistic Simulation of Si3N4 CVD from Dichlorosilane and NH3.- Interconnects and Propagation of High Frequency Signals.- Modeling of Electromigration in Interconnects.- Predictive Modeling of Transition Metal Gathering: Applications and Materials Science ChallengesCall number: Grundsignatur: 2004 A 28155PPN: PPN: 37255654X
Holdings
Item type Home library Collection Shelving location Call number Status Barcode
Freihandbestand ausleihbar Bibliothek Campus Süd nach 8.22 Lesesaal Technik (LST) 2004 A 28155 Available 46591791090
Total holds: 0
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