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Shape and functional elements of the bulk silicon microtechnique : a manual of wet-etched silicon structures ; with 75 tables / Joachim Frühauf

By: Resource type: Ressourcentyp: BuchBookPublisher number: 10929872Language: English Publisher: Berlin ; Heidelberg [u.a.] : Springer, 2005Description: XII, 221 S. : Ill., graph. Darst. ; 24 cmISBN:
  • 3540221093
Subject(s): Additional physical formats: Online-Ausg.: Shape and Functional Elements of the Bulk Silicon Microtechnique. Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005. Online-Ressource | Erscheint auch als: Shape and Functional Elements of the Bulk Silicon Microtechnique. Online-Ausgabe. Berlin, Heidelberg : Springer Berlin Heidelberg, 2005. Online-Ressource (XII, 221 p. 165 illus, digital)DDC classification:
  • 620.193
  • 620
  • 530
RVK: RVK: ZN 3750 | ZN 4136LOC classification:
  • QC611.8.S5
Action note:
  • 2
Summary: This manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. A systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications is given. It includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. Especially written for producers of sensors and microtechnical components. it serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon. TOC:Intention.- Technological Basis of the Bulk-Silicon Microtechnique.- General Overview of the Shape- and functional Elements of the {100}- Bulk- Silicon- Microtechnique.- Simple Shape Elelments.- Elements for Mechanical Applications. Elements for Fluidic Applications.- Elements withOptical Applicationas.- Physical Properties of SiliconCall number: Grundsignatur: 2005 A 9535PPN: PPN: 390320862
Holdings
Item type Home library Collection Shelving location Call number Status Barcode
Freihandbestand ausleihbar Bibliothek Campus Süd nach 8.23 Lesesaal Technik (LST) 2005 A 9535 Available 47183465090
Total holds: 0

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