Journal of vacuum science & technology : the official journal of the American Vacuum Society / publ. by the American Institute of Physics

Contributor(s): Resource type: Ressourcentyp: Zeitschrift (Online)Periodical (Online)Language: English Volumes: Bände: Show volumesZeige BändePublisher: New York, NY : Inst., 1964-1982Description: Online-RessourceISSN:
  • 2331-1754
Other title:
  • Journal of vacuum science and technology
Former title: Früherer Titel: The journal of vacuum science and technology, Hauptsacht. bis 9.1972Genre/Form: Additional physical formats: 0022-5355 | Erscheint auch als: Journal of vacuum science & technology. Druck-Ausgabe. New York, NY : Inst., 1964DDC classification:
  • 530
Online resources: Publication dates: Erscheinungsverlauf: 1.1964 - 21.1982Holdings: KIT-Bibliothek: 1.1964,1 - 21.1982,4Continued by: Forts: Journal of vacuum science & technology. A, Vacuum, surfaces, and films., New York, NY : Inst., 1983.Continued by: Forts: Journal of vacuum science & technology. B, Microelectronics processing and phenomena., New York, NY : Inst., 1983.PPN: PPN: 504104373ZDB ID: ZDB-ID: 2212422-6
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355!URL-Ä(30-10-13)355!URL-Ä(19-12-16)

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