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Microlithography : science and technology / ed. by Kazuaki Suzuki; Bruce W. Smith
Contributor(s): Resource type: Ressourcentyp: BuchBookLanguage: English Series: Optical science and engineering ; 126Publisher: Boca Raton, Fla. [u.a.] : CRC Press, c 2007Edition: 2. edDescription: 848 S. : Ill., graph. DarstISBN:- 0824790243
- 9780824790240
- 621.381531
- 621.3815/31
- TK7836
| Item type | Home library | Collection | Shelving location | Call number | Status | Barcode | |
|---|---|---|---|---|---|---|---|
| Freihandbestand ausleihbar | Bibliothek Campus Süd | nach 8.23 | Lesesaal Technik (LST) | 2007 E 1618(2) | Available | 48933648090 |
Total holds: 0