APA

Stuart R. V., Stuart R. V., . (1983). Vacuum technology, thin films, and sputtering. New York, NY [u.a.]: Acad. Press.

Chicago

Stuart Robley V, Stuart R V, . 1983. Vacuum technology, thin films, and sputtering. New York, NY [u.a.]: Acad. Press.

Harvard

Stuart R. V., Stuart R. V., . (1983). Vacuum technology, thin films, and sputtering. New York, NY [u.a.]: Acad. Press.

MLA

Stuart Robley V, Stuart R V, . Vacuum technology, thin films, and sputtering. New York, NY [u.a.]: Acad. Press. 1983.