EUV lithography / Vivek Bakshi, ed.

Contributor(s):

Bakshi, Vivek [Hrsg.]

Resource type: Ressourcentyp: BuchBookLanguage: English Series: SPIE. SPIE press monograph ; 178Publisher: Bellingham, Wash. : SPIE Press [u.a.], c 2009Description: XXVII, 673 S. : Ill., graph. DarstISBN:

9780819469649
9780470471555

Other title:

extreme ultraviolet

Subject(s):

Additional physical formats: Erscheint auch als: EUV lithography. Online-Ausgabe. Bellingham, Wash. : SPIE Press ;, 2009. 1 online resource (xxvii, 673 pages)DDC classification:

621.3815 22

RVK: RVK: ZN 4170LOC classification:

QC459

Action note:

Call number: Grundsignatur: 2009 E 1302PPN: PPN: 564716499

Holdings ( 2 )
Title notes ( 1 )

Holdings
Item type	Home library	Collection	Shelving location	Call number	Copy number	Status	Barcode
Freihandbestand ausleihbar	Bibliothek Campus Nord	nach 8.23	Lesesaal CN	2009 E 1302	;b	Available	50879243090
Freihandbestand ausleihbar	Bibliothek Campus Süd	nach 8.23	Lesesaal Technik (LST)	2009 E 1302		Available	49992695090

Total holds: 0

Archivierung prüfen 20200919 DE-640 2 pdager

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