Inertial MEMS : principles and practice / Volker Kempe

By:

Kempe, Volker [aut]

Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Publisher: Cambridge ; New York : Cambridge University Press, 2011Edition: Online-AusgDescription: Online-Ressource (1 online resource (xiv, 475 p.)) : illISBN:

9781283006149
1283006146
9780511932021

Subject(s):

Additional physical formats: 9780511932021 | 0521766583 | 9780521766586 | 1283006014 | Druckausg.: 1-283-00601-4 | Druckausg.: 978-0-521-76658-6 DDC classification:

629.04/5 22
629.045

RVK: RVK: ZN 3750LOC classification:

TK7875

Online resources:

Zugang im Netz des KIT

Summary: A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors.Summary: Cover -- Half-title -- Title -- Copyright -- Contents -- Preface -- Acknowledgments -- Notation -- 1 Introduction -- 1.1 A short foray through the pre-MEMS history -- 1.2 Applications and market -- 1.3 The ingredients of inertial MEMS -- References -- 2 Transducers -- 2.1 Anisotropic material properties, tensors, and rotations -- 2.1.1 Stress, strain, and piezoresistivity -- Hooke's law -- Normal stresses -- Shear stresses -- Stress and strain tensors -- The stress--strain relation for anisotropic materials -- The piezoresistance of silicon -- 2.1.2 Rotation of coordinate systems -- Coordinate frames -- The rotation tensor -- Transformation of tensors of second order -- 2.2 Piezoresistive transducers -- 2.2.1 Piezoresistors -- 2.2.2 Piezoresistors on silicon -- Thin piezoresistors -- Temperature compensation in piezoresistors -- 2.2.3 Piezoresistors on polysilicon -- 2.3 Piezoelectric transducers -- 2.3.1 The piezoelectric effect -- 2.3.2 Piezoelectric equations -- Piezoelectric sensors in MEMS -- 2.4 Capacitive transducers -- 2.4.1 Electrostatic forces -- 2.4.2 Parallel-plate capacitors -- Capacitance sensing -- The pull-in effect -- 2.4.3 Tilting-plate capacitors -- Nonlinear distortions -- Instabilities of a singular tilting plate -- Instabilities of the tilting capacitance pair -- 2.4.4 Comb capacitors -- Unidirectional linear combs -- Bidirectional actuation -- Radial combs -- Frame-based capacitors -- 2.4.5 Levitation -- Comb levitation -- Levitation in drive combs -- Reduction of levitation forces -- References -- 3 Non-inertial forces -- 3.1 Springs -- 3.1.1 Beams -- 3.1.2 The stiffness matrix -- 3.1.3 The bending equation for beams -- Internal forces and moments -- Differential relations of a bent beams -- 3.1.4 Cantilever beams -- Cantilevers under different loads -- Skew beam bending and asymmetric suspensions.PPN: PPN: 809227614Package identifier: Produktsigel: ZDB-26-MYL | ZDB-30-PQE

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