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Principles of microelectromechanical systems / Ki Bang Lee
Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Publisher: Hoboken, N.J : Wiley, c2011Edition: Online-AusgDescription: Online-Ressource (1 online resource (xii, 667 p.)) : illISBN:- 9781283024891
- 9780470649664
- 1283024896
- Principles of MEMS
- 621.381
- TK7875
Contents:
PPN: PPN: 809244802Package identifier: Produktsigel: ZDB-26-MYL
""Title page""; ""Copyright page""; ""Dedication""; ""PREFACE""; ""CHAPTER 1 INTRODUCTION""; ""1.1 MICROELECTROMECHANICAL SYSTEMS""; ""1.2 COUPLED SYSTEMS""; ""1.3 KNOWLEDGE REQUIRED""; ""1.4 DIMENSIONAL ANALYSIS""; ""CHAPTER 2 MICROFABRICATION""; ""2.1 BULK AND SURFACE MICROMACHINING""; ""2.2 LITHOGRAPHY""; ""2.3 LAYER DEPOSITION""; ""2.4 LAYER ETCHING""; ""2.5 FABRICATION PROCESS DESIGN""; ""CHAPTER 3 STATICS""; ""3.1 STATIC EQUILIBRIUM""; ""3.2 STRESSâ€"STRAIN RELATIONSHIP""; ""3.3 THERMAL STRESS""; ""3.4 BEAM BEHAVIOR SUBJECTED TO A TORSIONAL MOMENT""
""3.5 MOMENTâ€"CURVATURE RELATIONSHIP""""3.6 BEAM EQUATION""; ""3.7 GALERKIN’S METHOD""; ""3.8 ENERGY METHOD""; ""3.9 ENERGY METHOD FOR BEAM PROBLEMS""; ""CHAPTER 4 STATIC BEHAVIOR OF MICROSTRUCTURES""; ""4.1 ELEMENTS OF MICROSTRUCTURES""; ""4.2 STIFFNESS OF COMMONLY USED BEAMS""; ""4.3 TRUSSES""; ""4.4 STIFFNESS TRANSFORMATION""; ""4.5 STATIC BEHAVIOR OF PLANAR STRUCTURES""; ""4.6 RESIDUAL STRESS""; ""4.7 CUBIC FORCE OF STRUCTURES""; ""4.8 POTENTIAL ENERGY""; ""4.9 ANALOGY BETWEEN POTENTIAL ENERGIES""; ""CHAPTER 5 DYNAMICS""; ""5.1 CUBIC EQUATION""
""5.2 DESCRIPTION OF MOTION""""5.3 GOVERNING EQUATIONS OF DYNAMICS""; ""5.4 ENERGY CONVERSION BETWEEN POTENTIAL AND KINETIC ENERGY""; ""5.5 FREE VIBRATION OF UNDAMPED SYSTEMS""; ""5.6 VIBRATION OF DAMPED SYSTEMS""; ""5.7 MULTIDEGREE-OF-FREEDOM SYSTEMS""; ""5.8 CONTINUOUS SYSTEMS""; ""5.9 EFFECTIVE MASS, DAMPING, AND STIFFNESS""; ""5.10 SYSTEMS WITH REPEATED STRUCTURES""; ""5.11 DUFFING’S EQUATION""; ""CHAPTER 6 FLUID DYNAMICS""; ""6.1 VISCOUS FLOW""; ""6.2 CONTINUITY EQUATION""; ""6.3 NAVIERâ€"STOKES EQUATION""; ""6.4 REYNOLDS EQUATION""; ""6.5 COUETTE FLOW""
""6.6 OSCILLATING PLATE IN A FLUID""""6.7 CREEPING FLOW""; ""6.8 SQUEEZE FILM""; ""CHAPTER 7 ELECTROMAGNETICS""; ""7.1 BASIC ELEMENTS OF ELECTRIC CIRCUITS""; ""7.2 KIRCHHOFF’S CIRCUIT LAWS""; ""7.3 ELECTROSTATICS""; ""7.4 FORCE AND MOMENT DUE TO AN ELECTRIC FIELD""; ""7.5 ELECTROSTATIC FORCES AND MOMENTS ACTING ON VARIOUS OBJECTS""; ""7.6 ELECTROMAGNETIC FORCE""; ""7.7 FORCE ACTING ON A MOVING CHARGE IN ELECTRIC AND MAGNETIC FIELDS""; ""7.8 PIEZORESISTANCE""; ""7.9 PIEZOELECTRICITY""; ""CHAPTER 8 PIEZOELECTRIC AND THERMAL ACTUATORS""; ""8.1 COMPOSITE BEAMS""
""8.2 PIEZOELECTRIC ACTUATORS""""8.3 THERMAL ACTUATORS""; ""CHAPTER 9 ELECTROSTATIC AND ELECTROMAGNETIC ACTUATORS""; ""9.1 ELECTROSTATIC ACTUATORS""; ""9.2 COMB DRIVE ACTUATOR""; ""9.3 PARALLEL-PLATE ACTUATOR""; ""9.4 TORSIONAL ACTUATOR""; ""9.5 FIXEDâ€"FIXED BEAM ACTUATOR""; ""9.6 CANTILEVER BEAM ACTUATOR""; ""9.7 DYNAMIC RESPONSE OF GAP-CLOSING ACTUATORS""; ""9.8 APPROXIMATION OF GAP-CLOSING ACTUATORS""; ""9.9 ELECTROMAGNETIC ACTUATORS""; ""CHAPTER 10 SENSORS""; ""10.1 FORCE AND PRESSURE SENSORS""; ""10.2 ACCELEROMETERS""; ""10.3 ELECTROSTATIC ACCELEROMETERS""
""10.4Â VIBRATORY GYROSCOPES""
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