Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials, and MEMS / edited by Kiyotaka Wasa ...

Contributor(s):

Wasa, Kiyotaka, 1937- [oth]

Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Publisher: Waltham [Mass.] : Elsevier/William Andrew, 2012Edition: 2nd ed (Online-Ausg.)Description: Online-Ressource (1 online resource (xii, 644 p.)) : illISBN:

9781283704786
9781437734843
1283704781

Subject(s):

Additional physical formats: 1437734839 | 9781437734836 | Druckausg.: Handbook of sputter deposition technology. 2. ed. Amsterdam : Elsevier, William Andrew, 2012. XII, 644 S.DDC classification:

671.738
671.7/38 22

RVK: RVK: UP 7550 | ZN 4150 | ZM 7620LOC classification:

TS695

Online resources:

Zugang im Netz des KIT

PPN: PPN: 809976811Package identifier: Produktsigel: ZDB-26-MYL

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