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Photoresist Use in Semiconductor Manufacturing / Organisation for Economic Co-operation and Development

Contributor(s): Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Series: Series on Emission Scenario Documents ; no.9Publisher: Paris : OECD Publishing, 2014Description: Online-Ressource (117 p.)ISBN:
  • 9789264221161
Subject(s): DOI: DOI: 10.1787/9789264221161-enOnline resources: Summary: This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used in the semiconductor manufacturing industry. The document presents standard approaches for estimating environmental releases of and occupational exposures to additives and components used in photoresist formulations.PPN: PPN: 814245951Package identifier: Produktsigel: ZDB-13-SOC | ZDB-13-SOC-ebook
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