Silicon wet bulk micromachining for MEMS / Prem Pal, Kazuo Sato
Contributor(s): Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Publisher: Singapore : Pan Stanford Publishing, [2017]Copyright date: ©2017Description: 1 Online-Ressource (1 online resource)ISBN:- 9789814613736
- 9781315364926
- 9781315341279
- TK7875
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