EUV lithography / Vivek Bakshi, editor

Contributor(s):

Bakshi, Vivek [HerausgeberIn]

Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Series: SPIE press monograph ; PM 283Publisher: Bellingham, Washington, USA : SPIE Press, [2018]Copyright date: © 2018Edition: Second editionDescription: 1 Online-RessourceISBN:

9781510616790
9781510616806
9781510616813

Subject(s):

Fotolithografie Halbleitertechnologie
Extremes Ultraviolett

Additional physical formats: 9781510616783 DOI: DOI: 10.1117/3.2305675Online resources:

Zugang im Netz des KIT

PPN: PPN: 1015175775Package identifier: Produktsigel: ZDB-50-SPI

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