Lithography process control / Harry J. Levinson
Mitwirkende(r): Resource type: Ressourcentyp: Buch (Online)Buch (Online)Sprache: Englisch Reihen: Tutorial texts in optical engineering ; 28Verlag: Bellingham, Wash. <1000 20th St. Bellingham WA 98225-6705 USA> : SPIE, c1999Beschreibung: 1 online resource (x, 190 p. : ill.)ISBN:- 9780819478559
- 0819430528
- 9780819430526
- 621.38152
- 621.3815/2 21
- TK7871.85
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